JPH02102722U - - Google Patents

Info

Publication number
JPH02102722U
JPH02102722U JP1053489U JP1053489U JPH02102722U JP H02102722 U JPH02102722 U JP H02102722U JP 1053489 U JP1053489 U JP 1053489U JP 1053489 U JP1053489 U JP 1053489U JP H02102722 U JPH02102722 U JP H02102722U
Authority
JP
Japan
Prior art keywords
frequency electrode
flat high
electrode
substrate support
plasma cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1053489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1053489U priority Critical patent/JPH02102722U/ja
Publication of JPH02102722U publication Critical patent/JPH02102722U/ja
Pending legal-status Critical Current

Links

JP1053489U 1989-01-31 1989-01-31 Pending JPH02102722U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1053489U JPH02102722U (en]) 1989-01-31 1989-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1053489U JPH02102722U (en]) 1989-01-31 1989-01-31

Publications (1)

Publication Number Publication Date
JPH02102722U true JPH02102722U (en]) 1990-08-15

Family

ID=31218281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1053489U Pending JPH02102722U (en]) 1989-01-31 1989-01-31

Country Status (1)

Country Link
JP (1) JPH02102722U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158982A (ja) * 2003-11-26 2005-06-16 Kaneka Corp Ｃｖｄ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158982A (ja) * 2003-11-26 2005-06-16 Kaneka Corp Ｃｖｄ装置

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